| 半导体混合产品批间控制的理论与实验研究 |
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| 引用本文： | 郑英,王彦吨.半导体混合产品批间控制的理论与实验研究[J].半导体技术,2008,33(5):454-457. |
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| 作者姓名： | 郑英 王彦吨 |
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| 作者单位： | 华中科技大学,控制科学与工程系,武汉,430074;中煤国际工程集团,武汉设计研究院,武汉,430064 |
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| 基金项目： | 国家自然科学基金
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湖北省自然科学基金 |
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| 摘 要： | 提出了用一种半导体工业用双产品模型来研究基于机台和基于产品的控制方法.在此基础上,得到了闭环系统的输出,评估了控制性能.由于NH3的挥发类似于半导体工业的机台漂移,因此对纳米级SiO2粒子进行了实验研究.在氨溶液挥发的影响下制造不同大小的SiO2粒子,以模拟在机台干扰下生产不同产品.实验研究证实了理论结果,即基于机台的方法有时不稳定,而基于产品的方法是稳定的.
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| 关 键 词： | 批间控制 基于机台的控制方法 基于产品的控制方法 二氧化硅粒子大小控制 |
| 文章编号： | 1003-353X(2008)05-0454-04 |
| 修稿时间： | 2007年12月14 |
Theoretical and Experimental Studies on Semiconductor Mixed Product Run-to-Run Control |
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| Zheng Ying,Wang Yandun.Theoretical and Experimental Studies on Semiconductor Mixed Product Run-to-Run Control[J].Semiconductor Technology,2008,33(5):454-457. |
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| Authors: | Zheng Ying Wang Yandun |
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| Affiliation: | Zheng Ying1,Wang Y,un2 (1.Dept. of Control Science , Engineering,Huazhong University of Science , Technology,Wuhan 430074,China,2. Wuhan Design & Research Institute of Sinocoal International Engineering Group,Wuhan 430064,China) |
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| Abstract: | A novel two-product model for semiconductor industry was developed to investigate the tool-based and product-based approaches. The closed-loop responses were derived and control performances were evaluated. As the effect of ammonia vaporization was similar to the tool drifting, the experimental study of the preparation of nano scale SiO2 particles was investigated. Different nano scale SiO2 particles were produced by the effect of ammonia solution vaporization for simulating the process of different product... |
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| Keywords: | run-to-run(RtR)control tool-based control product-based control SiO2 particle size control |
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