An infrared gas microflowmeter |
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Authors: | A V Rumyantsev P R Shevchenko K V Gus’kov |
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Affiliation: | (1) Faculty of Physics, Kant Russian State University, ul. A. Nevskogo 14, Kaliningrad, 236041, Russia |
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Abstract: | A new principle of measuring a gas flow rate from the emittance of the surface of the heat-sensitive element heated to a high (~1270 K) temperature is described. It is shown that the transfer to the high-temperature region ensures independence of gas flowmeter readings on the temperature of both the incoming gas flow and external environment and that the use of a two-chamber design ensures independence of flowmeter readings on its orientation. The flowmeter does not include control and amplifying circuits. The relative error is ~0.5% and does not exceed ~0.2% at the flow orificing. The sensitivity of the flowmeter varies from 1.9 to 1.0 V/(mg s?1) in a 0-to 8-mg/s range. The time constant is not worse than ~0.5–0.6 s at a 50% flow rate variation, and that of the orifice flowmeter is ~0.2–0.3 s. |
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