| MEMS工艺模拟与有限元软件接口的实现(英文) |
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| 引用本文： | 简福建,李伟华.MEMS工艺模拟与有限元软件接口的实现(英文)[J].光学精密工程,2009,17(7). |
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| 作者姓名： | 简福建 李伟华 |
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| 作者单位： | 东南大学,电子科学与工程系MEMS教育部重点实验室,江苏,南京,210096 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 微机电系统工艺模拟可在实际加工前预测MEMS器件的实际结构,有利于理解工艺机理,缩短设计周期,减少生产费用.针对目前用于MSMS器件分析的模拟软件尚不能很好地与有限元软件对接的问题,设计了工艺模拟软件与有限元分析软件的接口.通过这个接口,将MEMS工艺模拟所得到的数据经过数据格式的转换导入有限元分析软件(ANSYS)中并建模,使之可以进行诸如机械、热、电等物理参量的分析.在分析了目前关于(曲线)边界轮廓提取的各种方法后,引进了最大圈算法,解决了工艺模拟结果在有限元软件中的模型重构问题,实现了从工艺模拟到有限元分析的无缝对接.提出的接口设计对实现MEMS CAD体系化具有重要的促进作用.
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| 关 键 词： | 微机电系统 工艺模拟 有限元分析 接口 |
Realization of interface between MEMS process simulation and finite element software |
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| JIAN Fu-jian,LI Wei-hua.Realization of interface between MEMS process simulation and finite element software[J].Optics and Precision Engineering,2009,17(7). |
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| Authors: | JIAN Fu-jian LI Wei-hua |
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| Affiliation: | JIAN Fu-jian,LI Wei-hua(Key Laboratory of MEMS of the Ministry of Education,Department of Electronic Science and Engineering,Southeast University,Nanjing 210096,China) |
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| Abstract: | The process simulation for Micro-electric-mechanic Systems(MEMS)can be used in predicting the actual structure of a MEMS before processing,which contributes to understand processing properties,shorten design periods and to reduce production costs.Because the current simulation software for MEMS analysis can not be combined with a finite element software,this paper presents a interface named as ANDYD Parametric Design Language(APDL)to link the process simulation software and the finite element software.By pr... |
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| Keywords: | MEMS process simulation Finite Element Analysis(FEA) interface |
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