Influence of substrate temperature on the structural,optical and electrical properties of ZnO thin films prepared by spray pyrolysis

The influence of substrate temperature on the structural, optical and electrical properties of ZnO films prepared by the spray pyrolysis method using aqueous solution of zinc acetate has been investigated. The films are polycrystalline and X-ray diffraction measurements show a strong preferred orientation along the [002] plane which is strongly dependent on the substrate temperature. Optical absorption spectra, show high transparency of the film (90–95% transmission) in the visible range, with a sharp absorption edge around 375 nm wavelength of light which closely corresponds to the intrinsic band gap of ZnO (3.3 eV). ZnO films with the lowest resistivity, which is due to the increased mobility resulting from the improvement of the crystallinity of the films, can be prepared at a substrate temperature of 490 °C.