| 基于Parylene的柔性神经微电极的研制和表征 |
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| 引用本文： | 李博,惠春,徐爱兰,邢玉梅,任秋实.基于Parylene的柔性神经微电极的研制和表征[J].传感器与微系统,2007,26(10):101-102,113. |
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| 作者姓名： | 李博 惠春 徐爱兰 邢玉梅 任秋实 |
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| 作者单位： | 1. 上海交通大学,微纳科学技术研究院,微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海,200030
2. 上海交通大学,生命科学技术学院,上海,200030 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) |
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| 摘 要： | 衬底集成的微电极是植入式微系统中的重要部件,起着对神经进行电刺激并记录神经信号的关键作用。采用微细加工技术在新型柔性基底——聚对二甲苯(Parylene)上制作微电极阵列。阐述了Parylene基微电极阵列的加工工艺,并利用光学显微镜和电化学表征技术对微电极的表面形貌和电学性能进行了研究。结果表明:在工作频率范围内(104~105Hz),柔性神经微电极的阻抗值低(400~1000Ω),相位延迟小(-20°),适于用作视网膜修复。
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| 关 键 词： | 柔性基底 神经微电极阵列 聚对二甲苯 微细加工 |
| 文章编号： | 1000-9787（2007）10-0101-02 |
| 修稿时间： | 2007-03-02 |
Development and characterization of flexible Parylene-based neural microelectrodes |
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| LI Bo,HUI Chun,XU Ai-lan,XING Yu-mei,REN Qiu-shi.Development and characterization of flexible Parylene-based neural microelectrodes[J].Transducer and Microsystem Technology,2007,26(10):101-102,113. |
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| Authors: | LI Bo HUI Chun XU Ai-lan XING Yu-mei REN Qiu-shi |
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| Abstract: | Substrate-integrated electrodes are the key components in implantable microsystems for recording of neural signals or electrical stimulation of nerves.A micro fabrication technique is introduced to fabricate multielectrode arrays based on a new flexible substrate—Parylene.The process technology for Parylene-based microelectrode arrays is described.Surface topography and electrical properties of the microelectrodes are characterized by optical microscope and electrochemical method.The result indicates that in the working frequeney(104~105Hz),the impedance is low(400～1 000 Ω),and the phase angle is small(-20°),which is suit for the application of retinal renovation. |
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| Keywords: | flexible substrate neural microelectrode array Parylene microfabrication |
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