| 扫描隧道显微镜轮廓测量数学模型的研究 |
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| 引用本文： | 刘安伟,杨勇,齐鹏,胡小唐.扫描隧道显微镜轮廓测量数学模型的研究[J].计量学报,1999,20(1):22-26. |
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| 作者姓名： | 刘安伟 杨勇 齐鹏 胡小唐 |
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| 作者单位： | 天津大学精仪学院,天津,300072 |
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| 基金项目： | 微机理研究专项青年基金 |
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| 摘 要： | 在量子隧道效应的基础上，建立了适用于增坦表面的扫描隧道显微镜微观轮廓测量的数学模型，并采用傅里叶变换方法对该模型进行了仿真验证。仿真结果表明，该模型较好地反映了扫描隧道显微镜对样品表面轮廓的测量过程。最后，中还对该模型的适用范围进行了讨论。
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| 关 键 词： | 扫描隧道显微镜 轮廓测量 卷积 傅里叶变换 |
Scanning Tunneling Microscope Mathematical Model for the Topographic Measurement |
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| Liu Anwei,Yang Yong,Qi Peng,Hu Xiaotang.Scanning Tunneling Microscope Mathematical Model for the Topographic Measurement[J].Acta Metrologica Sinica,1999,20(1):22-26. |
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| Authors: | Liu Anwei Yang Yong Qi Peng Hu Xiaotang |
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| Abstract: | A scanning tunneling microscope (STM) mathematical model for the topographic measurement is proposed on the basis of tunneling effect, which can be applicable to the smooth sample surface. Emulating verification to this model is accomplished by means of Fourier transform method. The emulating results demonstrate that this model fits the STM topographic measuring process well. Finally, the scope of application of this model is discussed. |
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| Keywords: | Scanning tunneling microscope (STM) Topographic measurement Convolution Fourier transform |
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