|
|||||
|
|
The P300: A system for automatic patterned wafer inspection |
|
| Authors: | Byron E Dom Virginia H Brecher Raymond Bonner John S Batchelder Robert S Jaffe |
| Affiliation: | (1) IBM Almaden Research Center, 650 Harry Rd., 95120-6099 San Jose, CA, USA;(2) IBM T.J. Watson Research Center, 10598 Yorktown Heights, NY, USA |
| Abstract: | |
| Keywords: | IC inspection integrated circuit inspection wafer inspection machine vision industrial inspection |
| 本文献已被 SpringerLink 等数据库收录！ | |