不同阳极结构二维PSD的电流—位置输出特性

本文介绍了四边形电极结构，四边形电极改进结构和带电阻边框的方框形电极结构3种二维位敏器件（PSD）的结构和工作原理，导出了3种结构PSD的输出电流理论表达式和位置线性度网络图。结果表明：四边形电极结构PSD的位置偏差最大，中央60％光敏区域内最大位置误差约10．0％，与实验结果相符；四边形电极改进结构PSD在中央60％光敏区域内最大位置误差约5．0％；带电阻边框的方框形电极结构，当边框电阻很小时，位置信号与输出电流之间满足线性关系，实验测得中央79％光敏区域内的均方根位置误差小于0．3％。

The Current-position Characteristics of Two Dimensional Position Sensitive Detectors with Different Anode Structure

Several structure types of two dimensional position sensitive detectors have been developed,and three type of them are concerned in this paper.They are the tetra lateral PSD,the modified tetra lateral PSD and the resistance bordered PSD .The structure characteristic and operation principle of these three type PSD are described,and their current output formula are derived theoretically.The linearity position grid maps based on the current and the position formula are obtained and compared.The maximum position error in the 60% sensitive area of tetra lateral PSD and modified tetra lateral PSD are 10.0% and 5.0%,respectively.The current position characteristic of the bordered PSD is linear.These theoretical results are agreed with the experimental results.