| 双通道压电式密度传感器的研究 |
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| 引用本文： | 李文鹏,赵新生,张鹏,申大忠.双通道压电式密度传感器的研究[J].传感器与微系统,2001,20(8):4-6. |
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| 作者姓名： | 李文鹏 赵新生 张鹏 申大忠 |
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| 作者单位： | 1. 山东省计量科学研究所,
2. 山东大学化学与化工学院, |
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| 基金项目： | 山东省自然科学基金;Q99B01; |
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| 摘 要： | 在同一压电石英晶片上制备两个石英晶体谐振器 ,实验结果表明双通道之间的相互干扰可以忽略。在石英晶体表面修饰多孔TiO2 膜层 ,可大大提高传感器对液体密度的灵敏度。采用两个修饰不同厚度TiO2 膜层的双通道压电传感器的频率差作为测量信号 ,可以消除液体粘度的影响 ,并获得与液体密度有良好线性关系的工作曲线 ,实现液体密度的测定
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| 关 键 词： | 密度 液体 压电 传感器 |
| 文章编号： | 1000-9787(2001)08-0004-03 |
| 修稿时间： | 2001年4月22日 |
Study on double-channel piezoelectric sensor for liquid density determination |
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| LI Wen peng ,ZHAO Xin sheng ,ZHANG Peng ,SHEN Da zhong.Study on double-channel piezoelectric sensor for liquid density determination[J].Transducer and Microsystem Technology,2001,20(8):4-6. |
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| Authors: | LI Wen peng ZHAO Xin sheng ZHANG Peng SHEN Da zhong |
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| Affiliation: | LI Wen peng 1,ZHAO Xin sheng 2,ZHANG Peng 2,SHEN Da zhong 2 |
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| Abstract: | Double channel quartz crystal resonators were prepared on a single piezoelectric quartz crystal disc.It was shown that the interfere between the two channels is negligible.After modifying with a thin mesoporous TiO 2 film, the sensitivity of the piezoelectric resonator to liquid density is significantly improved.By using the frequency difference of two resonators modified with TiO 2 film of different thickness,influence of the liquid viscosity was corrected.The frequency difference between the two channels is in a good linearity with the densities of liquids.The double channel piezoelectric sensors can be used to the determination of densities of liquids. |
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| Keywords: | density liquid piezoelectric sensor |
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