| SOI技术及其设备 |
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| 引用本文： | 翁寿松. SOI技术及其设备[J]. 电子工业专用设备, 2006, 36(3): 43-45 |
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| 作者姓名： | 翁寿松 |
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| 作者单位： | 无锡市罗特电子公司,江苏,无锡,214001 |
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| 摘 要： | 介绍了SOI技术的特点和制造方法、超薄SOI技术,应变硅SOI技术及其设备,如大束流专用氧离子注入机。
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| 关 键 词： | SOI技术 超薄S0I 应变硅S0I 大束流 专用氧离子注入机 |
| 文章编号： | 1004-4507(2006)00-0043-03 |
| 收稿时间： | 2006-01-15 |
| 修稿时间： | 2006-01-15 |
SOI Technology and its Equipment |
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| WANG Shou-song. SOI Technology and its Equipment[J]. Equipment for Electronic Products Marufacturing, 2006, 36(3): 43-45 |
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| Authors: | WANG Shou-song |
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| Affiliation: | Wuxi Luo Te Electronic,Ltd, Wuxi 214001, China |
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| Abstract: | In this paper, the characteristics and manufacturing method of SOI technology, ultra-thin SOI technology, strained silicon SOI technology and its equipment such as big beam flow private oxygen ion injecting equipment are introduced. |
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| Keywords: | Silicon-on-Insulator technology Ultra-thin-SOI Strained silicon SOI Big beam flow Private oxygen ion injecting equipment. |
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