|
|||||
|
|
Dielectric constant and dissipation factor in LTCVD SiO2 films |
|
| Authors: | C. Cobianu C. Pavelescu V. M. Catuneanu |
| Affiliation: | (1) Microelectronica, Str. Erou Iancu Nicolae, 34-B, R-72996 Bucharest, Romania;(2) Department of Electronics, Polytechnical Institute of Bucharest, O.P. 16, 76206 Bucharest, Romania |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |