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Sub‐5 nm Patterning by Directed Self‐Assembly of Oligo(Dimethylsiloxane) Liquid Crystal Thin Films
Authors:Koen Nickmans  Jeffrey N Murphy  Bas de Waal  Philippe Leclère  Jan Doise  Roel Gronheid  Dick J Broer  Albertus P H J Schenning
Affiliation:1. Laboratory of Functional Organic Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Eindhoven, The Netherlands;2. Laboratory of Macromolecular Organic Chemistry, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Eindhoven, The Netherlands;3. Laboratory for Chemistry of Novel Materials, Center for Innovation and Research in Materials and Polymers (CIRMAP), University of Mons (UMONS), Mons, Belgium;4. Department of Electrical Engineering, K.U. Leuven, Leuven, Belgium;5. Imec vzw, Leuven, Belgium;6. Institute for Complex Molecular Systems, Eindhoven University of Technology, Eindhoven, The Netherlands
Abstract:
Keywords:directed self‐assembly  graphoepitaxy  high‐χ  low‐N  liquid crystals  nanolithography  nanopatterning  oligo(dimethylsiloxane)
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