Hochreines Monosilan für die Elektronikindustrie – Synthese,Reinigung und Charakterisierung

High-purity monosilane for the electronics industry – Synthesis, purification, characterization. Monosilane is used in the electronics industry in the production of integrated circuits and in the manufacture of amorphous silicon devices such as solar cells, photocopier drums, and flat TV screens. The first German production unit for high purity monosilane gas which came on stream in 1987 is presented. The gas produced in a molten salt process is purified to highest quality and analyzed.