Effect of HF and NaOH etching on the composition and structure of SiOC ceramics

Porous SiOC ceramics were prepared with tetraethoxysilane (TEOS) and vinyltriethoxysilane (VTES) as sol?gel precursors, and followed by etching with HF and NaOH solution. The microstructure evolution and chemical etching as a function of pyrolysis temperature were investigated. The amorphous carbon increases as rising the temperature from 800 ^oC to 1200 ^oC, and the graphitic carbon increases with further etching by HF and NaOH. However, the effect of pyrolysis temperature on the structure of C is more significant. The hydroxylation reaction and phase separation of SiOC ceramics results in the increase of SiO₄ unit, which reacts with HF and NaOH to form micro- and mesopores. The existence of mesopore after HF etching provides more specific surface area and pore volume. However, NaOH etching produces more micropores, and the contribution of micropores to specific surface area and pore volume is higher than that of mesopores. Although HF and NaOH etching increase the specific surface area of SiOC ceramics, the etching effect of NaOH is superior to that of HF etching, and the carbon-enriched SiOC ceramics are obtained after NaOH etching.