单极板微位移电容传感器结构设计与优化

根据单极板微位移电容传感器结构优化设计的问题,提出了一种基于纵横推进法的电磁场仿真参数化建模方法。在建立合理的单极板电容传感器电磁仿真参数模型基础上,首先通过仿真实验选择保护环和绝缘层缺口的最优值。然后依据仿真得到的最优值,选择结构与最优值接近的电容传感器产品对比,取得了较好的研究结果,电容仿真值与实际测量值误差小于0.3%。最后对电容传感器极板倾斜对测量结果的影响进行了研究,极板倾斜2°时测量误差为1.6%。电容传感器结构优化结果满足实际工程要求。

Structure design and optimization of single-plate capacitive sensor for micro displacement measuring

According to problem of structure optimal design of single-plate capacitive sensor for micro displacement measuring,a parametric modeling method for electromagnetic field simulation based on vertical and horizontal propulsion means is presented.First,on the basis of establishing reasonable electromagnetism simulation parameter model for single-plate capacitive sensor,through simulation experiment chooses optimal value for guard ring and the gap for insulating layer.Then according to optimal value obtaine by simulation experiment,comparing to the actual capacitive sensor of structure approximation to optimal value,achieve good results,error of simulation results and actual measurement capacitance value is less than 0.3 %.Finally,influence of tilt plate of capacitive sensor on measuring result is studied,when the tilt angle is 2°,error of measurement value is 1.6 %.Structure optimal result for capacitive sensor meet for practical engineering requirement.