| 聚苯胺/十六氯酞菁锌杂化有机半导体氯气传感器的研究 |
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| 引用本文： | 雷廷平,施云波,吕文龙,刘洋,陶巍,袁鹏亮,林立伟,孙道恒,王立权.聚苯胺/十六氯酞菁锌杂化有机半导体氯气传感器的研究[J].半导体学报,2010,31(8):084010-5. |
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| 作者姓名： | 雷廷平 施云波 吕文龙 刘洋 陶巍 袁鹏亮 林立伟 孙道恒 王立权 |
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| 作者单位： | [1]College of Physics and Mechanical ＆ Electrical Engineering, Xiamen University, Xiamen 361005, China [2]Mechanical Engineering Center for Post-doctoral Studies, Harbin Engineering University, Harbin 150001, China [3]Higher Educational Key Laboratory for Measuring ＆ Control Technology and Instrumentations of Heilong/iang Province, School of Measurement Control Tech ＆ Communications Engineering, Harbin Uhiversity of Science and Technology, Harbin 150080, China [4]Qingyang Secondary Specialized School of Science and Technology, Qingyang 745000, China [5]Department of Mechanical Engineering and Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720, USA |
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| 摘 要： | 本文采用微加工技术在硅片上制作了铂金叉指电极，通过真空共蒸发沉积制备了聚苯胺/十六氯酞菁锌气敏薄膜，借助SEM对沉积膜进行了表征分析，并分析了氯气作用下影响该薄膜自身性能的相关因素，同时也对该传感器进行了气敏性能测试。实验结果表明：当聚苯胺与十六氯酞菁锌化学计量比为2：3时，薄膜对氯气有很好的敏感特性；最佳的蒸发沉积条件为基片温度160 ℃、蒸发温度425 ℃、薄膜厚度75 nm；提高工作温度(100 ℃以上)或增加气体浓度(100 ppm以上)，均可以提高响应特性，但二者都将存在一个上限值。最后，我们也对该气敏薄膜的敏感机理进行了讨论。
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| 关 键 词： | 气体传感器 聚苯胺 有机半导体 薄膜厚度 氯气 混合 扫描电镜分析 最佳真空 |
| 收稿时间： | 1/21/2010 8:38:13 PM |
| 修稿时间： | 4/7/2010 11:10:29 PM |
Chlorine gas sensors using hybrid organic semiconductors of PANI/ZnPcCl16 |
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| Lei Tingping Shi Yunbo L Wenlong Liu Yang Tao We Yuan Pengliang Lin Liwei Sun Daoheng Wang Liquan.Chlorine gas sensors using hybrid organic semiconductors of PANI/ZnPcCl16[J].Chinese Journal of Semiconductors,2010,31(8):084010-5. |
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| Authors: | Lei Tingping Shi Yunbo L Wenlong Liu Yang Tao We Yuan Pengliang Lin Liwei Sun Daoheng Wang Liquan |
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| Affiliation: | College of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China;Mechanical Engineering Center for Post-doctoral Studies, Harbin Engineering University, Harbin 150001, China; Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, School of Measurement Control;College of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China;College of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China;College of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China;Qingyang Secondary Specialized School of Science and Technology, Qingyang 745000, China;Department of Mechanical Engineering and Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720, USA;College of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China;Mechanical Engineering Center for Post-doctoral Studies, Harbin Engineering University, Harbin 150001, China |
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| Abstract: | |
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| Keywords: | PANI/ZnPcCl16 hybrid organic semiconductors chlorine gas sensors vacuum co-deposition oindent |
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