| 氮化钛薄膜的高分辨AES谱和XPS谱研究 |
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| 引用本文： | 张庆瑜.氮化钛薄膜的高分辨AES谱和XPS谱研究[J].真空科学与技术学报,1996(1). |
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| 作者姓名： | 张庆瑜 |
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| 作者单位： | 大连理工大学三束材料表面改性国家重点联合实验室!大连116023 |
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| 摘 要： | 着重讨论了TiNx薄膜俄歇电子谱的定量分析方法和X射线光电子谱中线形的变化。利用已知组元强度定量分析技术和Ti的LMV俄歇电子峰，探讨TiNx薄膜中N含量的定量方法。由该方法给出的定量结果与X射线光电子谱定量结果相一致。同时，利用X射线光电子谱测定了TiN和Ti2N2p轨道的结合能。并针对Ti2p峰形随N含量的变化，给出新的解释。
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| 关 键 词： | 氮化钛膜 高分辨率 俄歇电子谱 X射线光电子谱 |
INVESTIGATION OF TITANIUM NITRIDES FILMS BY HIGH RESOLUTION AUGER ELECTRON SPECTROSCOPY AND X-RAY PHOTOELECTRON SPECTROSCOPY |
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| Zhang Qingyu.INVESTIGATION OF TITANIUM NITRIDES FILMS BY HIGH RESOLUTION AUGER ELECTRON SPECTROSCOPY AND X-RAY PHOTOELECTRON SPECTROSCOPY[J].JOurnal of Vacuum Science and Technology,1996(1). |
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| Authors: | Zhang Qingyu |
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| Abstract: | The paper focused on the quantitative Auger analysis of TiN. films and Ti 2p line shapechange in the X-ray photoelectron spectra. A linear least-squares method,which quantitatively decomposedthe experimental data obtained from surface analytical techniques into its separate components,was applied todetermine the nitrogen contents in the TiN. films by computer fitting of the Ti LMV Auger lines. The resultsobtained by this method are in good agreement with that determined by X-ray photoelectron spectroscopy.The binding energies of Ti 2p in TiN,Ti,N films were measured by X-ray photoelectron spectroscopy. Thereasou why the Ti 2p line shape changes with N content,was discussed. |
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| Keywords: | Titanium nitrides films High resolution Auger electron spectroscopy X-ray photoelectron spectroscopy |
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