一种基于柔性铰链微旋转平台设计与仿真

针对微/纳精密操作定位精度需求,采用压电驱动方法,设计一种基于柔性铰链的新型微旋转平台。设计一个直角柔性铰链一级放大机构对机构的输入位移进行放大;并对放大倍数和旋转角度进行了理论分析;比较该微旋转定位平台输出位移理论值和ANSYS有限元仿真值,理论值和仿真值基本吻合;对微旋转定位平台的柔性铰链应力变形进行了验证,在满足其输出位移情况下,材料的力学性能符合设计要求。

Design and Simulation of a New Type of Micro Rotating Platform Based on Flexure Hinge

A new micro-rotating platform based on flexure hinges was designed by using piezoelectric actuation method to meet the precision requirement of micro/nano precision positioning. The input displacement of the mechanism was magnified by the first order magnifying mechanism with the right angle flexible hinge, and the magnification and rotation angle were analyzed theoretically. The theoretical value of the output displacement of the micro rotating positioning platform was compared with the ANSYS simulation value, and the theoretical value was basically consistent with the simulation one. The stress and deformation of the flexure hinge of the micro rotating positioning platform were verified, and the mechanical properties of the selected material met the design requirements when the output displacement was satisfied.