基于双压电陶瓷片的反射模式近场扫描光学显微镜

介绍了一种反射模式近场扫描光学显微镜。该系统以双压电陶瓷片作为控制光纤探针与待测样品之间距离的核心元件，以粘有光纤探针的双压电陶瓷片的第一个谐振频率来驱动光纤探针平行于样品表面振动，采用均方根检测电路测量振动信号的幅度，进而控制光纤探针与样品之间的距离在样品表面的近场范围之内。利用该系统获得了标定光栅和刻录光盘薄膜等样品表面的剪切力形貌图像和反射模式近场光学图像。

A reflection mode SNOM based on piezoelectric bimorph

A SNOM operating in reflection mode was described in this article. A kind of piezoelectric bimorph was used in this system as the key component for tip-sample distance regulation. The optical fiber probe oscillates parallel to the sample surface by driving the bimorph with the probe at its first modal resonance. The RMS detecting circuit was used to measure the amplitude of the oscillating signal. The distance between the optical fiber probe and the sample can be regulated in the near-field of the sample surface .The fine shear force topographic images and the near-field optical images of the calibration grating and the film of CD-R disk have been obtained.