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MOCVD生长GaAs,Ga_(t-x)Al_xAs及其异质材料在HBT上的应用
摘    要:本文研究了MOCVD生长GaAs,Ga_(1-x)Al_xAs的生长工艺及材料特性,生长出用于HBT的Ga_(1-x)Al_xAs/GaAs多层异质结构材料。器件的最大电流放大系数为100,截止频率为2.4GHz。


GaAs, Ga_(1-x)Al_xAs Grown by MOCVD and the Related Heterostructures for HBT
Abstract:The process and properties of GaAs and Ga_(1_x)Al_xAs grown by MOCVD have been investigated. The、 multilayer material with heterostructures for HBT has been grown. Current amplification factor β and cut-off frequency of the obtained HBT is about 100 and 2.4GHz, respectively.
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