MEMS穿孔板微执行器动态Pull-in特性分析

本文基于穿孔板静电微执行器的基本模型，在忽略和考虑压膜阻尼效应的两种情况下，采用能量法推导了静电微执行器的动态Pull-in参数公式，并结合ANSYS软件得到动态Pull-in参数的仿真值。通过对比两种情况下的Pull-in电压和Pull-in位移，得出了阻尼比变化对动态Pull-in参数的影响。结果表明，压膜阻尼效应会增大Pull-in电压、减小Pull-in位移；当阻尼比大于0.4，动态Pull-in电压值将与静态Pull-in电压值一致；当阻尼比大于0.5，动态Pull-in位移值将与静态Pull-in位移值一致。

Analysis of Dynamic Pull-in Phenomena for Perforated-Plate Electrostatic Micro-Actuator

Based on the model of perforated-plate electrostatic micro-actuator, energy method is used to derive its dynamic Pull-in parameter formula without and with considering squeeze damping effect. Meanwhile, ANSYS is also used to get the simulation value of dynamic Pull-in parameter. By comparing the Pull-in voltages and Pull-in displacements under the two circumstances mentioned above, the effects of damping ratio on Pull-in parameter can be obtained. The results show that, with the existence of squeeze damping effect, Pull-in voltage will increase and Pull-in displacement will decrease. When the damping ratio is greater than 0.4, the dynamic Pull-in voltage value will be consistent with the static Pull-in voltage value; when the damping ratio is greater than 0.5, the dynamic Pull-in displacement value will be consistent with the static Pull-in displacement value.