无线通信系统中的MEMS天线

本文分析了常见的MEMS天线及其应用,包括多对称锥形弯曲缝隙微带天线、用于WLAN中的微尺度宽频天线、开关式微机械毫米波天线、微机械自适应贴片天线等,对这些天线的结构原理、制造方法及其性能做了分析。这些天线设计简单、可用CMOS工艺制造、利于集成,兼有宽频、高辐射效率、小尺度等优点。但相对普通天线而言,这些制造工艺明显复杂、尺度更微小,增加了实现难度,要实现MEMS天线批量应用,还需要在基础理论及其微细工艺进行研究。最后,对MEMS天线在无线通信系统中的应用作出展望。

MEMS antenna of wireless communication systems

MEMS antennas and application is studied in this paper,and including with dual tapered meander slot antenna,small size broadband MEMS antenna of WLAN,switchable MEMS antenna of millimeter wave,adaptive MEMS antenna etc.Theory of these antenna,manufacturing and performances are studied.Structures of antenna are simple,and it is machined by CMOS technology,it is easy to integrate with other circuit.These antennas are high band,high efficiency and small scale.Manufacture technology of MEMS is complex,and scale is small,comparing with normal antenna.Basic theory and micromaching are farther studied for getting MEMS antenna application,and the development trend of MEMS antenna is discussed as well.