| 基于斜入射的平面度绝对检验方法 |
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| 引用本文： | 韩志刚,陈磊,高波,李建欣,刘兆栋.基于斜入射的平面度绝对检验方法[J].仪器仪表学报,2011,32(3). |
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| 作者姓名： | 韩志刚 陈磊 高波 李建欣 刘兆栋 |
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| 作者单位： | 1. 南京理工大学电子工程与光电技术学院,南京,210094
2. 成都精密光学工程研究中心,成都,610041 |
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| 基金项目： | 江苏省333高层次人才培养项目 |
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| 摘 要： | 为了获得高反射率光学平面的绝对面形分布,提出了基于斜入射的平面度绝对检验方案.该方法通过菲索干涉仪的空腔干涉以及两次斜入射测量得到三组波面数据,使用Zemike多项式对波面拟合,通过求解待测表面的旋转不变量和旋转因变量获得整个平面的绝对面形分布.测量90 mm口径的镀铝反射镜,其绝对检验结果为0.266λ(PV),0.075λ(RMS).讨论了测试中斜入射角及旋转角的选取方法,并分别选择45°和54°进行测试.基于斜入射的平面度绝对检验方法操作步骤简单,特别适合于高反射率光学表面的绝对面形检测.
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| 关 键 词： | 干涉测量 绝对检验 斜入射 Zernike多项式 |
Absolute flatness measurement method based on oblique incidence testing |
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| Han Zhigang,Chen Lei,Gao Bo,Li Jianxin,Liu Zhaodong.Absolute flatness measurement method based on oblique incidence testing[J].Chinese Journal of Scientific Instrument,2011,32(3). |
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| Authors: | Han Zhigang Chen Lei Gao Bo Li Jianxin Liu Zhaodong |
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| Affiliation: | Han Zhigang1,Chen Lei1,Gao Bo2,Li Jianxin1,Liu Zhaodong1 (1 School of Electrical Engineering and Photoelectric Technology,Nanjing University of Science & Technology,Nanjing 210094,China,2 Chengdu Fine Optical Engineering Research Center,Chengdu 610041,China) |
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| Abstract: | To determine absolute flatness distribution of optical surfaces with high reflectivity,a test method based on oblique incidence is proposed.Three sets of wavefront data are achieved through cavity interference measurement with a Fizeau interferometer and two oblique incidence measurements.The absolute flatness distribution of the whole test surface is obtained through calculating the rotational invariant component and rotational variant component of the surface.The absolute flatness of a mirror coated with ... |
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| Keywords: | interferometry absolute measurement oblique incidence test Zernike polynomial |
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