Wet etching of proton-exchanged lithium niobate-a novel processingtechnique |
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Authors: | Laurell F. Webjorn J. Arvidsson G. Holmberg J. |
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Affiliation: | Inst. of Opt. Res., Stockholm; |
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Abstract: | A novel and simple method to etch lithium niobate is reported. It was found that proton exchanged areas on the c+-face of the crystal can be etched away using a mixture of HF:HNO3 while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton exchange process, as well as to form three-dimensional structures |
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