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Wet etching of proton-exchanged lithium niobate-a novel processingtechnique
Authors:Laurell   F. Webjorn   J. Arvidsson   G. Holmberg   J.
Affiliation:Inst. of Opt. Res., Stockholm;
Abstract:A novel and simple method to etch lithium niobate is reported. It was found that proton exchanged areas on the c+-face of the crystal can be etched away using a mixture of HF:HNO3 while the unexchanged regions are left untouched. The method can be used as a tool for studies of the proton exchange process, as well as to form three-dimensional structures
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