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Defects in CVDZnS |
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| Authors: | Ligang Fu Fanxiu Lü Xuewu Wang Naiguang Wei |
| Affiliation: | 1. School of Materials Science and Engineering, University of Science and Technology Beifing, Beifing 100083, China ;Beijing Guojng Infrared Opucal Technology Co. Ltd., General Research Institute for Nonferrous Metal s, Beijing 100088, China 2. School of Materials Science and Engineering, University of Science and Technology Beifing, Beifing 100083, China 3. Beijing Guojng Infrared Opucal Technology Co. Ltd., General Research Institute for Nonferrous Metal s, Beijing 100088, China |
| Abstract: | Defects seriously influence the optical properties and mechanical properties of CVDZnS.The deposition technique was introduced and experiment methods such as SEM,TEM and OM were adopted to study the defects:hexagonal phase,abnormally large grains,micro-cracks,micro-pores and impurities.The microstructures of these defects were observed,and the formation mechanisms of these defects were analyzed.Hexagonal ZnS as an impurity causes anisotropy in different directions with different refraction indexes and incre... |
| Keywords: | zinc sulfide chemical vapor deposition(CVD) defects microstructure |
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