钛合金表面Ti-TiN-Zr-ZrN多层膜制备及性能

采用多靶位真空阴极电弧沉积技术,在TC11钛合金表面制备24周期的Ti-TiN-Zr-ZrN软硬交替多元多层膜。用扫描电镜、X射线衍射仪、显微硬度计、结合力划痕仪、球-盘摩擦磨损试验仪、砂粒冲刷试验仪和3D表面形貌仪,研究多层膜的表面及截面形貌、相结构、厚度、硬度、膜/基结合力、摩擦磨损性能和抗砂粒冲蚀性能。结果表明:所制备TiTiN-Zr-ZrN多层膜厚度约为5.8μm,维氏显微硬度为28.10GPa,膜基结合力为56N;TC11钛合金表面镀多层膜后耐磨性提高了一个数量级,体积磨损率由7.06×10~(-13) m~3·N~(-1)·m~(-1)降低到3.03×10~(-14) m~3·N~(-1)·m~(-1);多层膜软硬层交替的结构,受砂粒冲蚀时裂纹扩展至金属软层时应力的缓冲而出现偏转,对TC11钛合金有良好的抗砂粒冲蚀保护作用。

Preparation and Properties of Ti-TiN-Zr-ZrN Multilayer Films on Titanium Alloy Surface

24 cycles Ti-TiN-Zr-ZrN soft-hard alternating multilayer film was deposited on TC11 titanium alloy by vacuum cathodic arc deposition method.The structure and performance of the multilayer film, especially wear and sand erosion resistance were investigated by various analytical methods including pin on disc wear tester, sand erosion tester, 3D surface topography instrument, scanning electron microscopy (SEM), X-ray diffraction(XRD), micro-hardness tester and scratch adhesion tester.The results indicate that the Vickers-hardness of the multilayer film with thickness of 5.8μm can reach up to 28.10GPa.The adhesive strength of these coatings can be as high as 56N.Wear rate of the multilayer coated alloy is one order of magnitude smaller than bare one, which decreased from 7.06×10-13m3·N-1·m-1 to 3.03×10-14m3·N-1·m-1.Multilayer films can play the role in hindering the extension of cracks, and thus sand erosion properties of the TC11 titanium alloy substrates are improved.