氮表面改性非晶碳基涂层的摩擦及腐蚀行为

目的 在本征无氢非晶碳涂层表面进行掺N表面改性处理，研究其摩擦性能与海水腐蚀行为的演变规律，为海洋防护非晶碳涂层应用提供新思路。方法 采用直流磁控溅射固体石墨靶制备非晶碳涂层，并在顶层进行N掺杂表面改性。改变Ar/N2气流量比来控制顶层掺N量，调控沉积时间，控制涂层厚度一致。SEM用于观测涂层厚度与截面形貌，XPS和Raman光谱仪分别用于表征涂层N掺杂量和碳键结构。涂层力学性能和动态摩擦因数则通过连续刚度模式纳米压痕仪和球盘式摩擦实验机测试得到。采用含有三电极体系的Gamry电化学工作站测量涂层的动电位极化曲线、电化学交流阻抗谱等电化学性能。结果 对无氢非晶碳涂层进行表面改性，随顶层改性N含量的增加，sp2—C易与N结合，导致sp2相含量降低。随着N含量的增加，涂层的力学性能逐渐提升，当N质量分数为21%时，硬度与弹性模量达到最大值，分别为11.71GPa和284.28GPa；但当N质量分数最小（12%）时，涂层的断裂韧性与抗弹塑性变形能力最优。由于顶层引入掺N层后，sp2润滑相减少，涂层摩擦因数显著上升，且随N含量的增大逐渐增大。在顶层引入N掺杂量较少的改性层有利于提高非晶碳的耐蚀...

Effect of Nitrogen Surface Modification on Tribology and Corrosion Behavior of Amorphous Carbon Coating

N-doped surface modification was carried out on the surface of intrinsic hydrogen free amorphous carbon coating, and the evolution law of its friction properties and seawater corrosion behavior was studied, which provided a new idea for the application of marine protective amorphous carbon coating. Amorphous carbon coating was prepared by DC magnetron sputtering on solid graphite target, and n-doped surface modification was carried out on the top layer. Change the Ar/N2 gas flow ratio to control the N content in the top layer, adjust the deposition time and control the coating thickness. SEM was used to characterize the coating thickness and cross-section morphology, XPS and Raman spectra were used to characterize the N-doping content and carbon bond structure of the coating, respectively. The mechanical properties and dynamic friction coefficient of the coating were measured by continuous stiffness mode nano indentation instrument and ball disc friction tester. Gamry electrochemical workstation with three electrode system was used to measure the electrochemical properties of the coating, such as potentiodynamic polarization curve and electrochemical AC impedance spectroscopy.