| Affiliation: | 1. Tukuba Research Center, NMEMS Technology Research Organization, 1-2-1 Namiki, Tsukuba, Ibaraki, Japan;2. Research and Development Center, Seiko Instruments Inc., 563 Takatsuka-Shinden, Matsudo-shi, Chiba 270-2222, Japan;3. Information and Robot Technology Research Initiative, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan;4. Department of Mechanical Engineering Precision Engineering Course, School of Engineering, Tokyo Denki University, 5, Senju Asahityo Adachi-ku, Tokyo, Japan;5. Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, Japan |
