| 分压力质谱计校准装置的性能测试及校准实验 |
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| 引用本文： | 李得天,冯焱,李正海. 分压力质谱计校准装置的性能测试及校准实验[J]. 真空与低温, 2001, 7(1): 21-26 |
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| 作者姓名： | 李得天 冯焱 李正海 |
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| 作者单位： | 兰州物理研究所,甘肃,兰州,730000 |
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| 摘 要： | 介绍了分压力质谱计校准装置的性能指标,并用分压力质谱计校准装置校准了一台四极质谱计,给出了灵敏度、图样系数、线性、质量刻度、分辨本领等校准结果,还研究了气体之间的相互影响.
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| 关 键 词： | 分压力测量 四极质谱计 校准 |
| 文章编号： | 1006-7086(2001)01-0021-06 |
| 修稿时间： | 2000-08-08 |
EXPERIMENTAL STUDY ON CALIBRATION SYSTEM OF MASS SPECTROMETERS FOR PARTIAL PRESSURE |
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| LI Detian,FENG Yan,LI Zhenghai. EXPERIMENTAL STUDY ON CALIBRATION SYSTEM OF MASS SPECTROMETERS FOR PARTIAL PRESSURE[J]. Vacuum and Cryogenics, 2001, 7(1): 21-26 |
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| Authors: | LI Detian FENG Yan LI Zhenghai |
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| Abstract: | The technical specifications of the calibration system of mass spectrometers for partial pressure were introduced,and a quadrupole mass spectrometer was calibrated by this calitration system.The calibration results including sensitivity,fragmentation factor,linearity,mass scale and resolving power are presented.In addition,the influences between gases were studied. |
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| Keywords: | parital pressure measurement quadruploe mass spectrometer calibration |
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