| 微电子机械技术的现状与发展 |
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| 引用本文： | 赵志诚.微电子机械技术的现状与发展[J].仪表技术与传感器,1997(6):1-2,20. |
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| 作者姓名： | 赵志诚 |
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| 作者单位： | 机械工业部沈阳仪器仪表工艺研究所 |
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| 摘 要： | 微电子机械技术是国际上新兴的科学前沿，它的发展会象微电子技术那样引发一场新的产业革命。本文介绍了微电子机械技术的主要工艺以及在微结构、微传感器、微执行器和微系统方面的研究进展，并对今后的研究动态进行了论述。
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| 关 键 词： | 微电子机械技术 传感器 动态 微电子机械系统 |
Present Situation and Trend of Development of Micro Electro Mechanical Technology |
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| Zhao Zhicheng Shenyang Institute of Instrumentation Technology,Shenyang ..Present Situation and Trend of Development of Micro Electro Mechanical Technology[J].Instrument Technique and Sensor,1997(6):1-2,20. |
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| Authors: | Zhao Zhicheng Shenyang Institute of Instrumentation Technology Shenyang |
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| Affiliation: | Zhao Zhicheng Shenyang Institute of Instrumentation Technology,Shenyang 110043. |
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| Abstract: | Micro electro mechanical technology (MEMT) is a new scientific frontier worldwide. Its development will surely trigger another industrial revolution just as that of microelectronics did. This paper presents the main processes of MEMT as well as the situation of researches on microstructures, microsensors, microactuators, and microsystems, as well as the trend of development. |
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| Keywords: | MEMT Sensor Present Situation and Trend of Development |
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