| 微机械谐振传感器的闭环恒幅驱动电路研究 |
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| 引用本文： | 王亚强,王跃林,丁纯,喻浩. 微机械谐振传感器的闭环恒幅驱动电路研究[J]. 仪器仪表学报, 1999, 20(4): 351-355 |
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| 作者姓名： | 王亚强 王跃林 丁纯 喻浩 |
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| 作者单位： | 1. 浙江大学信息与电子工程系,杭州,310027
2. 上海冶金研究所,传感技术国家重点实验室,上海,200050 |
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| 摘 要： | 本文分析了微机械谐振传感器的闭环工作特性，在此基础上研究了微机械谐振传感器的闭环恒幅驱动电路的设计原则，研制出闭环恒幅驱动电路，并在微谐振式真空传感器和双框架微谐振陀螺上得到应用。
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| 关 键 词： | 微机械谐振传感器 闭环恒幅驱动 静电激励微谐振式真空传感器 双框架微谐振式陀螺 |
Study on Closed-loop Driving Circuits of Micromechanical Resonator with Constant Vibrating Amplitude |
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| Wang Yaqiang,Wang Yuelin,Ding Chun,Yu Hao. Study on Closed-loop Driving Circuits of Micromechanical Resonator with Constant Vibrating Amplitude[J]. Chinese Journal of Scientific Instrument, 1999, 20(4): 351-355 |
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| Authors: | Wang Yaqiang Wang Yuelin Ding Chun Yu Hao |
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| Abstract: | In this paper, we analyze the characteristics of closed-loop micromechanical resonator. We research the design principles of the closed loop driving circuits of micromechanical resonator with constant vibrating am- plitude on the basis of analysis. Then, we develop the closed-loop driving circuits and apply the circuits to the micromechanical resonators. |
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| Keywords: | Micromechanical resonator Closed loop driving circuit Electrostatic driven vacuum resonator Two-gimbal microgyroscope |
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