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| 复杂结构的大容器氦质谱检漏技术 | |
| 引用本文： | 梁凯基,张远青. 复杂结构的大容器氦质谱检漏技术[J]. 真空与低温, 2000, 6(2): 108-110 |
| 作者姓名： | 梁凯基 张远青 |
| 作者单位： | 广东真空设备厂股份有限公司!广东肇庆526020 |
| 摘 要： | 叙述了复杂结构的大型真空容器氦质谱检漏应用技术 ,分析了其中存在的问题。提出应设置合适的检漏系统、适当降低检漏速度及对复杂部位进行局部检漏等方法 |
| 关 键 词： | 氦质谱仪 检漏 真空 大容器 |
HELIUM SPECTRUM LEAK DETECTING TECHNOLOGY FOR LARGE CHAMBER WITH COMPLEX CONSTRUCTION |
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| LIANG Kai ji,ZHANG Yuan qing,CAI Dong feng,DAI Jin fu. HELIUM SPECTRUM LEAK DETECTING TECHNOLOGY FOR LARGE CHAMBER WITH COMPLEX CONSTRUCTION[J]. Vacuum and Cryogenics, 2000, 6(2): 108-110 | |
| Authors: | LIANG Kai ji ZHANG Yuan qing CAI Dong feng DAI Jin fu |
| Abstract: | The helium mass spectrometer leak detecting technology for a large vacuum chamber with the complex construction is described.Some problems in operation are shown and analyzed.And solving methods are given to install suitable detecting systems and decelerate the detecting move and detect complex parts carefully. |
| Keywords: | helium mass spectrometer leak detection vacuum large chamber |
| 本文献已被 CNKI 维普 等数据库收录！ | |