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| 串联电容的静电驱动微执行器的动态Pull-in模型 | |
| 引用本文： | 方玉明,胡如夫,李普.串联电容的静电驱动微执行器的动态Pull-in模型[J].固体电子学研究与进展,2011,31(1):29-34. |
| 作者姓名： | 方玉明 胡如夫 李普 |
| 作者单位： | 1. 南京邮电大学电子与科学工程学院,南京,210003 2. 宁波工程学院机械工程系,浙江,宁波,315016 3. 东南大学机械工程学院,南京,211189 |
| 基金项目： | 国家自然科学基金，浙江省自然科学基金，江苏省自然科学基金，2010年度高校"青蓝工程"资助项目 |
| 摘 要： | 在MEMS执行器的设计中,求出准确的pull-in参数是至关重要的.在过去的研究中,在准静态假设下,电压控制的MEMS微执行器的pull-in模型已经被提出,并且还提出了一些拓宽微执行器稳定行程的方法.在动态条件下,电压控制的MEMS微执行器的pull-in模型也已经被提出.但是,还没有人研究如何提高微执行器动态稳定行... |
| 关 键 词： | 动态pull-in 微电子机械系统 平行平板 微执行器 |
Dynamic Pull-in of Parallel-plate Electrostatically MEMS Actuators with a Series Capacitance |
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| FANG Yuming,HU Rufu,LI Pu.Dynamic Pull-in of Parallel-plate Electrostatically MEMS Actuators with a Series Capacitance[J].Research & Progress of Solid State Electronics,2011,31(1):29-34. | |
| Authors: | FANG Yuming HU Rufu LI Pu |
| Abstract: | Predicting the pull-in parameters is crucial in the design of MEMS actuators.In the past,under quasi-static assumptions,the model for pull-in parameters of voltage controlled MEMS actuators has been given and some techniques were used to extend the stable range of the microactuators.Under dynamic conditions,the model for dynamic pull-in parameters of voltage controlled MEMS actuators has also been given.However,no studies are done to extend the dynamic stable range of the MEMS actuators.This paper uses a voltage source with a series capacitance to extend the dynamic stable range of the MEMS actuators.Dynamic pullin parameters of voltage controlled MEMS actuators with a series capacitance have been presented.Finally,numerical method is used to simulate the dynamic pull-in behavior under the effect of the series capacitance.The effect of damping is also included in the numerical method. |
| Keywords: | dynamic pull-in MEMS parallel-plate microactuators |
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