| 0Cr15Ni5Cu2Ti不锈钢表面TiN膜层制备 |
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| 引用本文： | 陈美艳,陈健,沈丽如,童洪辉,金凡亚,许泽金. 0Cr15Ni5Cu2Ti不锈钢表面TiN膜层制备[J]. 真空, 2012, 49(3): 38-41 |
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| 作者姓名： | 陈美艳 陈健 沈丽如 童洪辉 金凡亚 许泽金 |
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| 作者单位： | 核工业西南物理研究院 四川 成都 610054 |
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| 基金项目： | 国家自然科学基金(10775046) |
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| 摘 要： | 0Cr15Ni5Cu2Ti不锈钢基材表面多弧离子镀方法制备TiN硬质涂层.工件表面镀膜处理技术的关键是膜/基结合强度.分析预热温度和工作偏压对膜层的膜/基结合强度、膜层结构及表面硬度的影响,优化制备工艺,满足使用要求.结果显示预热温度和工作偏压对膜/基结合效果影响显著.镀膜处理后,工件表面硬度大于1200HV0.05,膜/基结合力最小临界载荷高于60N.
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| 关 键 词： | 多弧离子镀 TiN 0Cr15Ni5Cu2Ti 维氏硬度 结合力 |
Preparation of TiN film on 0Cr15Ni5Cu2Ti stainless steel substrate |
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| CHEN Mei-yan , CHEN jian , SHEN Li-ru , TONG Hong-hui , JIN Fan-ya , XU Ze-jin. Preparation of TiN film on 0Cr15Ni5Cu2Ti stainless steel substrate[J]. Vacuum(China), 2012, 49(3): 38-41 |
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| Authors: | CHEN Mei-yan CHEN jian SHEN Li-ru TONG Hong-hui JIN Fan-ya XU Ze-jin |
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| Affiliation: | (Southwest Institute of Physics,Chengdu 610054,China) |
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| Abstract: | The TiN hard film was prepared on 0Cr15Ni5Cu2Ti(15-5PH) stainless steel substrate using the multi-arc ion plating technique.The influence of the preparation process on the film performance was analyzed in order to improve the preparation technology,such as the influence on the surface hardness,adhesive force,film structure,and so on.The results show that the film is well crystalloid after the preheating temperature higher than 200℃,the pseudo-diffusion zone is formed when the negative bias is at 600V.When using Ti as the interlayer under a preheating temperature of 250℃,a working pressure of 2.0Pa,and a negative bias of 650V,the adhesive force is above 60N,and the surface hardness is more than 1200 HV0.05.The properties of the work pieces can meet the operation requirements after coating process. |
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| Keywords: | multi-arc ion plating TiN 0Cr15Ni5Cu2Ti Vickers hardness adhesive force |
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