Sb掺杂SnO2/SiO2纳米光学气敏薄膜的制备及其性质

采用溶胶凝胶(sol-gel)工艺制备了Sb掺杂SnO2/SiO2复合膜。通过X射线衍射(XRD)、傅立叶变换红外谱(FT-IR)及原子力显微镜(AFM)表征了薄膜样品的物相结构与表面形貌,利用紫外-可见光谱研究了复合薄膜光学特性．利用p-偏振光双面反射法对薄膜的气敏特性进行了测试。实验结果表明,薄膜中的晶粒具有纳米尺寸(～35nm)的大小．比表面积大,孔隙率高;薄膜的透光率高,可见光波段近95％;纳米Sb：SnO2：SiO2复合膜的气敏灵敏度高于纯SnO2薄膜及Sb掺杂的SnO2薄膜。

Characteristics and Preparation of Nanometer-sized Sb-doped SnO2/SiO2 Optical Gas-sensing Thin Films

Sb-doped SnO_2/SiO_2 nano-composition thin films were prepared by sol-gel method.The crystal structure and surface topograph of the thin films were characterized by X-ray diffraction(XRD),Fourier transform infrared spectroscopy(FT-IR) and atomic force microscopy(AFM).The optical properties of the thin films were studied by UV-VIS spectra.The gas-sensing property was tested by p-polarized reflectance.The experimental results show that,the crystalline grain size is about 34 nm,the specific surface area is large,and the duty porosity is high;the optical transmissivity is higher,near 95 % in visible spectrum range.Further,the gas sensitivity of Sb:SnO_2/SiO_2 nano-composition thin films is higher than one of Sb:SnO_2 thin films.