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In situ visualization of degradation of silicon field emitter tips
Authors:Naoyuki Nozawa  Kuniyuki Kakushima  Gen Hashiguchi  Hiroyuki Fujita
Abstract:This paper deals with the simultaneous observation of both the electron field emission from nanoscopic tips by electrical means and their structural shape change by an ultra‐high resolution transmission electron microscope (TEM). Nanoneedles with sharp tips of radius in the nanometer range were fabricated with semiconductor micromachining technology. A correlation between the electron field emission characteristics and the structural change of the emitter tip was clearly observed. Copyright © 2007 Institute of Electrical Engineers of Japan© 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.
Keywords:micromachining  nanotechnology  field emission  nano tips  degradation
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