| Abstract: | In this paper, different types of vertical electrostatic comb‐drive actuators are proposed. The aim of design is to minimize the cross talk between vertical and lateral motions with a relatively simple fabrication process, namely, with only two ICP‐RIE steps from the front side with layered masks. Three designs are analyzed by MEMCAD, a finite‐element modeling package, combined with a micromachining process simulator. After optimization based on the calculation, all types were fabricated and tested. The experimental results are qualitatively in good agreement with the calculations. Because of the excess undercutting in our ICP‐RIE machine, the supports were softer than designed. The displacement was larger than expected. According to obtained results, we can expect to generate a vertical force of 0.5 µN per tooth at around 50 V. The measured cross talk between vertical motion and the horizontal motion was 20%. The resonant frequency of a typical device is 9 kHz and the displacement is 1.5 µm at 50 V. Copyright © 2007 Institute of Electrical Engineers of Japan© 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc. |
