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Materials,effects and components for tunable micro‐optics
Authors:Christoph Friese  Armin Werber  Florian Krogmann  Wolfgang Mnch  Hans Zappe
Abstract:An overview of recent activities in the area of tunable micro‐optical components is given. These include polymer‐based deformable mirrors for adaptive optics, tunable microlenses and arrays using fluids and membranes, pneumatically actuated scanning micromirrors and tunable Bragg filters and mirrors using swelling polymers. For each device, the structure, essential fabrication technology and optical characteristics, as well as a discussion of application areas are presented. Copyright © 2007 Institute of Electrical Engineers of Japan© 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.
Keywords:optical microsystems  micro‐optics  MEMS  MOEMS  liquid optics  tunable optics
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