1$,times,$ 16 Pt/4H-SiC Schottky Photodiode Array for Low-Level EUV and UV Spectroscopic Detection

This letter reports on a 1$,times,$ 16 Pt/4H-SiC Schottky photodiode array with a total detection area of 136.5 ${hbox{mm}}^{2}$ operating at the wavelength from 400 nm down to 7.5 nm. The array has an ultra low leakage current of 6.4 and 51 fA at $ - {hbox{0.4}} $ and $ - {hbox{5}}~{hbox{V}}$, respectively. In the vacuum ultraviolet (UV) range from 200 nm down to 10 nm, the quantum efficiency (QE) falls to a minimum of 30% at 160 nm, exceeds 100% at wavelengths shorter than 61 nm, and reaches 10 e-/photon at 10 nm, indicating the array has a high sensitivity. The maximum QE in the near UV range is 78% at 230 nm. The spectral detectivity is higher than 10$ ^{15}~{hbox{cmHz}}^{1/2}/{hbox{W}}$ in the wavelength range from 350 nm down to 7.5 nm. Crosstalk between adjacent pixels is investigated. A UV spectroscopic system using the photodiode array with a fine dispersion resolution of 1.5 nm/pixel has been demonstrated.