Comparison of the Effects of Environmental Treatments on Hydrogen Concentration and Energy Gap Variations of Hydrogenated Amorphous and Polymorphous Silicon Films Prepared by PECVD Technique |
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| Authors: | Keramatzadeh Alireza Kosarian Abdolnabi Kaabi Hooman |
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| Affiliation: | 1.Faculty of Engineering, Shahid Chamran University of Ahvaz, Ahvaz, Iran
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| Abstract: | Semiconductors - Hydrogen to silicon (Si–H) bond concentration and strength play important roles in high quality hydrogenated amorphous silicon layers prepared by PECVD techniques. In this... |
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