RF MEMS开关失效因素的COMSOL仿真

针对RF MEMS开关的可靠性问题,利用有限元软件COMSOL,对悬臂式RF MEMS开关周围的电场分布,开关上的电荷分布和本征频率进行了分析;并研究了在静电场和结构力场耦合作用下悬臂梁的内应力情况,找出开关损坏的可能部位,探索RF MEMS失效的机理,为悬臂式RF MEMS开关的优化改进提供理论依据。

COMSOL Simulation of Failure Mechanisms of RF MEMS Switch

To investigate the reliability problem of RF MEMS switches,the influence of electric field and frequency characteristics on the structure of RF MEMS switch was considered.The cantilevered RF MEMS switch was simulated using finite element analysis software COMSOL.The electric field around the cantilever and the surface charge density of the switch were analyzed,and the internal stress of the cantilever under the action of static field coupled with structural force field was investigated.To optimize the RF MEMS switch,possible locations of damage on the switch was identified and failure mechanisms of the RF MEMS switch was discussed.