| Epitaxial CeO_2 Thin Films on (1102) Sapphire Substrate |
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| 作者姓名： | 石东奇 杨秉川 王水平 彭正顺 王晓华 郝建民 王良 温业礼 |
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| 作者单位： | Shi Dongqi; Yang Bingchuan; Wang Xiaoping ; Peng Zhengshun; Wang Xiaohua(Genral Research Institute for Non-ferrous Metals，Beijing 10088，China)Hao Jianmin; Wang Liang and Wen Yeli(Tian jin Electronic Moterials Research Institute，Tian jin 300220，China) |
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| 摘 要： | ＥｐｉｔａｘｉａｌＣｅＯ＿２ＴｈｉｎＦｉｌｍｓｏｎ（１１０２）ＳａｐｐｈｉｒｅＳｕｂｓｔｒａｔｅＳｈｉＤｏｎｇｑｉ，ＹａｎｇＢｉｎｇｃｈｕａｎ，ＷａｎｇＸｉａｏｐｉｎｇ，ＰｅｎｇＺｈｅｎｇｓｈｕｎ，ＷａｎｇＸｉａｏｈｕａ（石东奇）（杨秉川）（王水平）...
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Epitaxial CeO_2 Thin Films on (1102) Sapphire Substrate |
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| Shi Dongqi, Yang Bingchuan, Wang Xiaoping , Peng Zhengshun, Wang Xiaohua.Epitaxial CeO_2 Thin Films on (1102) Sapphire Substrate[J].Rare Metals,1995(2). |
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| Authors: | Shi Dongqi Yang Bingchuan Wang Xiaoping Peng Zhengshun Wang Xiaohua |
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| Abstract: | |
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| Keywords: | e: CeO_2 film Sapphire substrate rf magnetron sputtering |
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