An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives

Authors:	S. Nakamura K. Suzuki M. Ataka H. Fujita S. Basrour V. Soumann M. Labachelerie W. Daniau

Affiliation:	(1) University of Tokyo Institute of Industrial Science 3rd Division Fujita Lab. 7-22-1 Roppongi, Kinato-ku Tokyo 106, Japan, JP;(2) LPMO, Institute des Microtedimigues de Franche-Comté, France, FR

Abstract:	We demonstrate an electrostatic micro actuator which is fabricated by LIGA process. The actuator is designed for a magnetic head tracking system of hard disk drives (HDDs). The actuator is essential to achieve very high track density of HDDs. We realize the aspect ratio of 125 by the LIGA process using a Si-Au mask. We propose to use PMMA molds both as the mechanical structure and as the insulator between electrodes. We believe there are great opportunity for the LIGA process in making micro actuators of HDDs. Received: 25 August 1997 / Accepted: 24 October 1997

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