半导体用BaZrO3-xNa2CO3粉末合金的烧结性能和电导率分析

为了提高半导体用BaZrO₃粉末合金的综合性能,在BaZrO₃混合粉末内添加不同比例的钠盐(Na₂CO₃),并加热到1 360℃保温烧结3 h,通过实验对其烧结性能和电导率进行了表征。研究结果表明:在试样断面区域形成了孔洞,大部分晶粒的粒径介于0.5~0.7μm之间。随BaZrO₃添加量增大至10%时,粉末合金组织中形成了分散状态小孔,获得了较高的致密度。随着烧结温度增加,试样致密度与收缩率明显升高。添加Na₂CO₃后有利于完成BaZrO₃粉末合金烧结过程,通过液相烧结使粉末合金组织更加致密。加入合适含量的Na₂CO₃能够使BaZrO₃粉末合金达到更低烧结温度,获得更优烧结效果。当温度升高后,BaZrO₃-Na₂CO₃粉末合金都发生了电导率上升,加入Na₂CO₃能够使BaZrO₃粉末合金获得更高的离子电导率。

Sintering properties and conductivity of BaZrO3-xNa2CO3 powder alloys for semiconductors

In order to improve the comprehensive properties of BaZrO₃ powder alloy for semiconductor,the mixed powders were added with different proportions of sodium salt (Na₂CO₃),heated to 1 360℃and sintered for 3 h,and the sintering properties and electrical conductivity were characterized by experiments.The results show that pores are formed in the cross-section area of the sample,and most of the grain sizes are between 0.5 and 0.7μm.When the addition amount of BaZrO₃ increases to 10%,dispersed pores are formed in the microstructure of powder alloy,and higher density is obtained.With the increase of sintering temperature,the density and shrinkage of the sample increase obviously.The addition of Na₂CO₃ is beneficial to complete the sintering process of BaZrO₃ powder alloy,and the microstructure of powder alloy becomes more dense through liquid phase sintering.Adding appropriate content of Na₂CO₃ can lower the sintering temperature of BaZrO₃ powder alloy,and obtain better sintering effect.The electrical conductivity of BaZrO₃-Na₂CO₃ powders increases with the temperature increasing.The addition of Na₂CO₃ can improve the ionic conductivity of BaZrO₃ powder alloy.