Study of deformation and porosity evolution of low temperature co-fired ceramic for embedded structures fabrication |
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| Authors: | LE Khoong YM Tan YC Lam |
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| Affiliation: | 1. Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore;2. Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore;1. Department of Materials Science and Engineering, University of Sheffield, S1 3JD, UK;2. Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic and Information Engineering, Xi’an Jiaotong University, Xi''an, 710049, China;3. Micro-Optoelectronic Systems Laboratories, Xi’an Technological University, Xi’an, 710032, Shaanxi, China;1. School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 610054, People''s Republic of China;2. Key Laboratory of Multi-Spectral Absorbing Materials and Structures of Ministry of Education, University of Electronic Science and Technology of China, People''s Republic of China;1. College of Materials Science and Engineering, Nanjing Tech University, Nanjing, Jiangsu 210009, China;2. Jiangsu Collaborative Innovation Center for Advanced Inorganic Function Composites, Nanjing Tech University, Nanjing, Jiangsu 210009, China |
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| Abstract: | The deformation behaviors of suspended low temperature co-fired ceramic (LTCC) laminates over a cavity and the evolution of open porosity of LTCC are studied for the fabrication of embedded structures in a multi-layer LTCC platform using carbon material. The effects of the type of LTCC materials (self-constrained and unconstrained LTCC), cavity width, laminate thickness, and lamination conditions on the deformation of the suspended LTCC laminate over a cavity are studied. For suspended three-layers and six-layers LTCC laminates over cavity width ranges from 10 to 25 mm, the self-constrained LTCC laminates were more dimensionally stable (sagged by less than ?120 μm) after sintering as compared to the unconstrained LTCC. The evolution of open porosity and the distribution of open pores in the self-constrained LTCC with changes in sintering temperature and laminate thickness are also studied for process optimization. |
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