| DKJ-Ⅰ型大片玻璃打孔机 |
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| 引用本文： | 陆宏,孙富. DKJ-Ⅰ型大片玻璃打孔机[J]. 仪表技术与传感器, 1996, 0(3) |
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| 作者姓名： | 陆宏 孙富 |
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| 作者单位： | 沈阳仪器仪表工艺研究所，沈阳仪器仪表工艺研究所 沈阳市 110043，沈阳市 110043 |
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| 摘 要： | 大片玻璃打孔机是一台硅压力传感器的生产设备。文章介绍了该设备的加工机理、设计原则、机床结构和技术指标;结合设备所采用的超声波多工具钻孔技术;解决的关键技术和整机的实用效果。
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| 关 键 词： | 玻璃 钻孔 传感器 超声波 打孔机 |
Model DKJ-I Drilling Machine for Large Glass Wafers |
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| Lu Hong and Sun FuShenyang Institute of Instrumentation Technology,Shenyang .. Model DKJ-I Drilling Machine for Large Glass Wafers[J]. Instrument Technique and Sensor, 1996, 0(3) |
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| Authors: | Lu Hong Sun FuShenyang Institute of Instrumentation Technology Shenyang . |
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| Affiliation: | Lu Hong and Sun FuShenyang Institute of Instrumentation Technology,Shenyang 110043. |
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| Abstract: | The drilling machine for large glass wafer processing is a production machine for silicon pressure sensors. This paper introduces the operating theory, design principle, mechanical structure and technical specifications. In combination with the ultrasonic multi-tooling techniques, the key problems tackled in the research and the practical application of the machine are also presented. |
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| Keywords: | Glass Drilling Sensor Ultrasonic Driller. |
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