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Mo2C过渡层对金刚石-碳膜场发射均匀性的影响
引用本文:王小平,王丽军,宋天福,姚宁,马会中,梁二军,王建恩,程桂萍,李广庭,杨仕娥,边超,李会军,张兵临.Mo2C过渡层对金刚石-碳膜场发射均匀性的影响[J].真空与低温,2002,8(2):93-96.
作者姓名:王小平  王丽军  宋天福  姚宁  马会中  梁二军  王建恩  程桂萍  李广庭  杨仕娥  边超  李会军  张兵临
作者单位:1. 郑州航空工业管理学院,基础部,河南,郑州,450005;郑州大学,物理工程学院材料物理重点实验室,河南,郑州,450052
2. 郑州航空工业管理学院,基础部,河南,郑州,450005
3. 郑州大学,物理工程学院材料物理重点实验室,河南,郑州,450052
基金项目:国家科委“86 3”项目,河南省高校骨干教师资助计划项目
摘    要:在经过不同特殊预处理的金属钼衬底上沉积了金刚石 -碳膜 ,分别用X射线衍射谱 (XRD)、拉曼光谱 (Raman)和扫描电子显微镜 (SEM)对样品进行了分析和测试 ,并研究了样品器件的场发射特性。结果发现在金属钼衬底和金刚石 -碳膜之间形成的Mo2 C过渡层与金刚石 -碳膜场发射均匀性有着密切的联系

关 键 词:金刚石-碳膜  场发射均匀性  Mo2C过渡层
文章编号:1006-7086(2002)02-0093-04
修稿时间:2001年12月12

EFFECT OF Mo2C INTERMEDIATE LAYER ON ELECTRON FIELD EMISSION UNIFORMITY OF DIAMOND- CARBON FILMS
WANG Xiao-ping ,WANG Li-jun ,SONG Tian-fu ,YAO Ning ,MA Hui-zhong ,LIANG Er-jun ,WANG Jian-en ,CHENG Gui-ping ,LI Guang-ting ,YANG Shi-e ,BIAN Chao ,LI Hui-jun ,ZHANG Bing-lin.EFFECT OF Mo2C INTERMEDIATE LAYER ON ELECTRON FIELD EMISSION UNIFORMITY OF DIAMOND- CARBON FILMS[J].Vacuum and Cryogenics,2002,8(2):93-96.
Authors:WANG Xiao-ping    WANG Li-jun  SONG Tian-fu  YAO Ning  MA Hui-zhong  LIANG Er-jun  WANG Jian-en  CHENG Gui-ping  LI Guang-ting  YANG Shi-e  BIAN Chao  LI Hui-jun  ZHANG Bing-lin
Affiliation:1.Zhengzhou Institute of Aeronautical I
Abstract:The diamond -carbon films were deposited on metal Mo substrates by using microwave chemical vapor deposition(CVD)technique (Mo substrates were pretreated by special techniques).The films were characterized by X-ray diffraction(XRD),Raman spectrum and scanning electron microscopy(SEM).The result of the experiments indicates that the Mo 2C interfacial layers formed between Mo substrate and the diamond-carbon films.The study demonstrated a strong correlation between the field emission uniformity and the Mo 2C interfacial layer.
Keywords:diamond-carbon films  field emission uniformity  Mo  2C interfacial layers
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