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Synthesis and characterization of plasma-polymerized tert-butylacrylate films
Authors:Hidenobu Aizawa  Shigeru Kurosawa  Kazutoshi Noda  Mitsuo Hirata
Affiliation:a National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
b Department of Applied Molecular Chemistry, College of Industrial Technology, Nihon University, 1-2-1 Izumi-cho, Narashino, Chiba 275-8575, Japan
Abstract:Plasma polymerized tert-butylacrylate (pp-t-BA) film was prepared using tert-butylacrylate monomer under 100 Pa of vapor pressure with varying RF power of 10-250 W and continuous wave RF power of 13.56 MHz. The deposition rates of pp-t-BA films were determined using quartz crystal microbalance (QCM) method. The chemical structure of pp-t-BA films was characterized using FT-IR, contact angle and XPS techniques. The gas sorption properties of pp-t-BA were measured using a QCM sensor array. Results showed that deposition rates of pp-t-BA film were proportional to the polymerization time at 100 Pa of monomer pressure under the same RF power. The deposition amount of pp-t-BA films increased gradually with increasing RF power of 30-150 W. Increasing the RF power on plasma polymerization decreased the amount of ester group in pp-t-BA films. Sensitivity of gas sorption on pp-t-BA films is related to the RF power of polymerization.
Keywords:Plasma processing and deposition   tert-butylacrylate   Quartz crystal microbalance (QCM)   Deposition rate
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