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| 用金刚石薄膜制造X射线掩模版 | |
| 引用本文： | 张文华 丁桂甫. 用金刚石薄膜制造X射线掩模版[J]. 微细加工技术, 1998, 0(1): 37-42 |
| 作者姓名： | 张文华 丁桂甫 |
| 作者单位： | 上海交通大学信息存储研究中心 |
| 摘 要： | 用金刚石薄膜作为支撑层，金作为吸收体；同时，采用Ｎｉ合金过渡层来解决金刚石与金之间结合力小，热匹配性能差等问题。制作的掩模版具有较好的反差效果。同时，还具有工艺简单，成品率高等特点。 |
| 关 键 词： | 同步幅射X射线，LIGA，X射线掩模版，金刚石薄膜 |
FABRICATION OF X-RAY MASK BY USING DIAMOND MEMBRANE |
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| Zhang Wenhua,Ding Guifu,Wang Qian, Xu Juntao,Zhang Shoubai. FABRICATION OF X-RAY MASK BY USING DIAMOND MEMBRANE[J]. Microfabrication Technology, 1998, 0(1): 37-42 | |
| Authors: | Zhang Wenhua Ding Guifu Wang Qian Xu Juntao Zhang Shoubai |
| Abstract: | Fabrication of X-ray mask is the key of LIGA technique. In our design,dia- mond membrane is used as a sustaining membrane, and gold as absorbing struc- ture. In order to enhance the bonding force between the sustaining membrane and absorbing structure,a thin film interlayer of Ni alloy is used. The mask has good contrast. The process is simple and the rate of finished products is high. Thus, it can be concluded that using diamond membrane to fabricate LIGA mask is a good method. |
| Keywords: | SR x-ray LIGA x-ray mask Diamond membrane |
| 本文献已被 CNKI 维普 等数据库收录！ | |