Fabrication of Ag nanoparticle/ZnO thin films using dual-plasma-enhanced metal-organic chemical vapor deposition (DPEMOCVD) system incorporated with photoreduction method and its application |
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| Affiliation: | 1. Centre for Research in Nanoscience and Nanotechnology (CRNN), University of Calcutta, Kolkata 700098, India;2. Department of Electronic Science, University of Calcutta, Kolkata 700009, India;1. College of Materials Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 211100, China;2. Physics Department and Center of Excellence in Nanotechnology, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia;3. Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China;4. Department of Physics, Southeast University, Nanjing 211189, China;5. Guangxi Key Laboratory of Information Materials, Guilin University of Electronic Technology, Guilin 541004, China;6. College of Energy and Power Engineering, Jiangsu Province Key Laboratory of Aerospace Power System, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;7. Collaborative Innovation Center for Advanced Aero-Engine, Beijing 100191, China;1. State Key Laboratory of Complex Nonferrous Metal Resources Cleaning Utilization in Yunnan Province, Kunming University of Science and Technology, Kunming 650093, People''s Republic of China;2. The National Engineering Laboratory for Vacuum Metallurgy and Faculty of Metallurgical and Energy Engineering, Kunming University of Science and Technology, Kunming 650093, People''s Republic of China |
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| Abstract: | We report a novel method to grow silver nanoparticle/zinc oxide (Ag NP/ZnO) thin films using a dual-plasma-enhanced metal-organic chemical vapor deposition (DPEMOCVD) system incorporated with a photoreduction method. The crystalline quality, optical properties, and electrical characteristics of Ag NP/ZnO thin films depend on the AgNO3 concentration or Ag content and annealing temperature. Optimal Ag NP/ZnO thin films have been grown with a AgNO3 concentration of 0.12 M or 2.54 at%- Ag content and 500 °C- rapid thermal annealing (RTA); these films show orientation peaks of hexagonal-wurtzite-structured ZnO (002) and face-center-cubic-crystalline Ag (111), respectively. The transmittance and resistivity for optimal Ag NP/ZnO thin films are 85% and 6.9×10?4 Ω cm. Some Ag NP/ZnO transparent conducting oxide (TCO) films were applied to InGaN/GaN LEDs as transparent conductive layers. The InGaN/GaN LEDs with optimal Ag NP/ZnO TCO films showed electric and optical performance levels similar to those of devices fabricated with indium tin oxide. |
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| Keywords: | Ag NP/zinc oxide Dual-plasma-enhanced metal-organic chemical vapor deposition Photoreduction InGaN/GaN light-emitting diodes (LED) |
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